合金系列 | AlCu, AlCr, AlMg, AlSi, AlSiCu, AlAg, AlV, CaNiCrFe, CaNiCrFeMoMn, CeGd, CeSm, CrSi, CoCr, CoCrMo, CoFe,CoFeB, CoNi, CoNiCr, CoPt, CoNbZr, CoTaZr, CoZr, CrV, CrB, CrSi, CrCu, CuCo, CuGa, CuIn, CuNi, CoNiPt, CuZr, DyFe,DyFeCo, FeB, FeC, FeMn, GdFe, GdFeCo, HfFe, IrMn, IrRe, InSn, MoSi, NiAl, NiCr, NiCrSi, NdDyFeCo, NiFe, NiMn, NiNbTi,NiTi, NiV, SmCo, AgCu, AgSn, TaAl, TbDyFe,TbFe,TbFeCo, TbGdFeCo, TiAl, TiNi, TiCr,WRe, WTi, WCu, ZrAl, ZrCu, ZrFe,ZrNb, ZrNi, ZrTi, ZrY, ZnAl, ZnMg | 采用高純單質(zhì)金屬,熔煉或粉末冶金工藝,后經(jīng)機(jī)械加工處理成型,表面車(chē)加工磨光 公差:+/-0.2mm | 規(guī)格:圓片/方型尺寸根據(jù)客戶(hù)要求定 制 |
硼化物靶材 | Cr2B, CrB, CrB2, Cr5B3, FeB, HfB2, LaB6, Mo2B, Mo2B5, NbB, NbB2, TaB, TaB2, TiB2,W2B, WB, VB, VB2, ZrB2 | 采用高純粉末,粉末熱壓工藝,后經(jīng)機(jī)械加工處理成型提供靶材綁定服務(wù) 公差:+/-0.2mm | 規(guī)格:圓片/方型尺寸根據(jù)客戶(hù)要求定 制 |
碳化物靶材 | B4C, Cr3C2, HfC, Mo2C, NbC, SiC, TaC, TiC, WC, W2C, VC, ZrC |
氮化物靶材 | AlN, BN, GaN, HfN, NbN, Si3N4, TaN, TiN, VN, ZrN |
氧化物靶材 | Al2O3, Sb2O3, ATO, BaTiO3, Bi2O3, CeO2, CuO, Cr2O3, Dy2O3, Er2O3, Eu2O3, Gd2O3, Ga2O3, GeO2, HfO2,Ho2O3, In2O3, ITO, Fe2O3, Fe3O4, La2O3, PbTiO3, PbZrO3, LiNbO3, Lu3Fe5O12, Lu2O3, MgO, MoO3, Nd2O3, Pr6O11, Pr(TiO2) 2, Pr2O3, Sm2O3, Sc2O3, SiO2, SiO, SrTiO3, SrZrO3, Ta2O5, Tb4O7, TeO2, ThO2, Tm2O3, TiO2, TiO, Ti3O5, Ti2O3,SnO2, SnO WO3, V2O5, YAG, Y3Al5O12, Yb2O3, Y2O3, ZnO 等 |